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1

The parameters of plasma and the kinetics of generation and loss of active particles under conditions of discharge in chlorine

A. M. Efremov, V. I. Svettsov, D. V. Sitanov

Journal:

High Temperature

Year:

2008

Language:

english

File:

PDF, 194 KB

english, 2008

2

A study of the decay of atoms in chlorine plasma on aluminum films

M. Yu. Iventichev, I. S. Boikova, D. V. Sitanov, V. I. Svettsov

Journal:

High Energy Chemistry

Year:

2010

Language:

english

File:

PDF, 142 KB

english, 2010

3

A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges

A.M. Efremov, V.I. Svettsov, D.V. Sitanov, D.I. Balashov

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 267 KB

english, 2008

4

Spectral measurements of the probability of recombination of active particles of plasma on solid surfaces in chlorine and its mixtures with inert and molecular gases

D. V. Sitanov, V. I. Svettsov, A. M. Efremov

Journal:

High Temperature

Year:

2008

Language:

english

File:

PDF, 151 KB

english, 2008

5

The parameters of plasma and the kinetics of generation and loss of active particles in chlorine-nitrogen mixtures

A. M. Efremov, D. V. Sitanov, V. I. Svettsov

Journal:

High Temperature

Year:

2008

Language:

english

File:

PDF, 222 KB

english, 2008

6

The formation and decay of atoms in a pulsed low-frequency glow discharge in a chlorine-hydrogen mixture

M. Yu. Iventichev, D. V. Sitanov, V. I. Svettsov

Journal:

High Temperature

Year:

2010

Language:

english

File:

PDF, 240 KB

english, 2010

7

The role of ions and UV radiation in gallium arsenide etching process

Yu. V. Kirillov, D. V. Sitanov, V. I. Svettsov

Journal:

High Energy Chemistry

Year:

2000

Language:

english

File:

PDF, 443 KB

english, 2000

8

Use of optical emission spectroscopy for determining the number concentration of chlorine atoms in a chlorine-oxygen plasma

A. E. Skorodumov, D. V. Sitanov, V. I. Svettsov

Journal:

High Energy Chemistry

Year:

2000

Language:

english

File:

PDF, 274 KB

english, 2000

9

Activation of natural aluminosilicates in the argon glow-discharge positive column

P. B. Razgovorov, D. V. Sitanov, V. Yu. Prokof’ev, Yu. K. Shchipalov

Journal:

High Energy Chemistry

Year:

2007

Language:

english

File:

PDF, 205 KB

english, 2007

10

Evaluating the Wall-Recombination Constant of Cl Atoms in Cl2-Ar Plasmas of Different Ar Percentage

Yu. V. Kirillov, D. V. Sitanov

Journal:

Russian Microelectronics

Year:

2005

Language:

english

File:

PDF, 66 KB

english, 2005

11

Determination of the Rate Coefficient for the Heterogeneous Recombination of Chlorine Atoms in a Plasma Reactor by the Relaxation Technique

Yu. V. Kirillov, D. V. Sitanov

Journal:

High Energy Chemistry

Year:

2004

Language:

english

File:

PDF, 61 KB

english, 2004

12

Heterogeneous recombination of atoms on aluminum samples in chlorine plasma

D. V. Sitanov,S. A. Pivovarenok

Journal:

High Temperature

Year:

2017

Language:

english

File:

PDF, 614 KB

english, 2017

13

Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma

Sitanov, D. V., Pivovarenok, S. A.

Journal:

Plasma Physics Reports

Year:

2018

Language:

english

File:

PDF, 910 KB

english, 2018

14

A study of heterogeneous recombination of chlorine atoms on aluminum and copper surfaces in glow discharge plasma

Sitanov, D. V., Pivovarenok, S. A.

Journal:

High Energy Chemistry

Year:

2017

Language:

english

File:

PDF, 630 KB

english, 2017

15

Visualization of Defects on the Semiconductor Surface Using a Dielectric Barrier Discharge

Sitanov, D. V., Pivovarenok, S. A.

Journal:

Russian Microelectronics

Year:

2018

Language:

english

File:

PDF, 980 KB

english, 2018

16

Determination of the probability of the heterogeneous recombination of chlorine atoms on the construction materials of plasma chemical reactors

M. Yu. Iventichev, D. V. Sitanov, V. I. Svettsov

Journal:

Russian Microelectronics

Year:

2011

Language:

english

File:

PDF, 176 KB

english, 2011

17

General features of interaction between copper and chlorine-containing gases

A. V. Dunaev,D. V. Sitanov,D. B. Murin

Journal:

High Energy Chemistry

Year:

2017

Language:

english

File:

PDF, 425 KB

english, 2017

18

Investigation of the mechanism of formation of chlorine atoms in chlorine-hydrogen plasmas

Yu. V. Kirillov, D. V. Sitanov, V. I. Svettsov

Journal:

High Energy Chemistry

Year:

2000

Language:

english

File:

PDF, 420 KB

english, 2000

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